Abstract
Thin films produced by laser breakdown chemical vapor deposition from nickel and iron carbonyls and by implanting Ni foils with varying levels of C have been characterizea by transmission electron microscopy. Decomposition of Ni(CO)4 produces polycrystalline films of fcc Ni and metastable ordered nexaogonal Ni3C. This metastable phase is identical to that produced by gas carburization, rapid solidification of Ni-C melts, and ion implantation ot C into Ni at low;co ncentrations. Increasing the H2 content in the gas mixture during laser deposition reduces the grain size of the films significantly witn grain sizes smaller than 10 nanometers produced. Laser uecomposition of Fe(CO)5 produces films with islands of fcc gamma-Fe and finely dispersed metastable Fe3C (Cementite). In addition, the ferrous oxides Fe2O3 and Fe3O4 were found in these samples. Implants of C into pure Ni foils at 77°K and at a concentration of 35 at.% produced amorphous layers. Implants at the same dose at room temperature did not proouce amorphous layers.
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Henon, S.K., Jervis, T.R. & Nastasi, M. Microstructure of Metastable Metallic Alloy Films Produced by Laser Breakdown Chemical Vapor Deposition and Ion Implantation. MRS Online Proceedings Library 80, 269–275 (1986). https://doi.org/10.1557/PROC-80-269
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DOI: https://doi.org/10.1557/PROC-80-269